• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    Disclosed are an inker used in an inspection process of a semiconductor device capable of detecting and correcting an operation error when an inking is performed on an electrically defective chip. To this end, the present invention is configured at the top of the inker solenoid head (inker solenoid head) to enable the inking (inking), the inker solenoid configured in the lower portion connected to the inker solenoid head, and is configured under the inker solenoid vertical movement The fish line for performing the ink line (ink line), the ink reservoir configured in the lower portion in contact with the fish line, the ink liner which is formed in the lower portion of the fish line by the vertical movement of the inker solenoid head and the fish line It provides an inker having a tip (inker tip), and a sensor unit for sensing the vertical movement of the inker solenoid head.
    公开号:KR20000021279A
    申请号:KR1019980040295
    申请日:1998-09-28
    公开日:2000-04-25
    发明作者:노봉호
    申请人:윤종용；삼성전자 주식회사；
    IPC主号:
    专利说明:

    Inker which can detect operation error when inking
    BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus used in a semiconductor inspection process, and more particularly, to an inker that performs a function of displaying a defective chip after an electrical inspection of a semiconductor device in a chip state.
    The chip, which is a semiconductor device processed in the wafer state, is subjected to an electric die sort test prior to the packaging process to check black or red dots for defective chips. Inking. The reason for this is to select the inking chips in the subsequent packaging process so as not to proceed any further process.
    1 is a cross-sectional view illustrating an inker capable of displaying a defective chip according to the prior art.
    Referring to Figure 1, the structure of the inker according to the prior art is composed of an inker solenoid head (51) to enable the inking (inking) by the vertical movement is configured on the upper portion and the lower portion connected to the inker solenoid head An inker solenoid 55, a fish line 57 formed below the inker solenoid to perform vertical movement, an ink reservoir 59 formed below and in contact with the fish line, and the fish line It is composed of an inker tip (inker tip, 61) configured in the lower portion to perform the inking of the wafer by the vertical movement of the inker solenoid head and the fish line. Reference numeral 53 is a signal line for supplying a signal to operate the inker solenoid 55.
    However, the inker according to the prior art moves the ink tip up and down to make the inking, and the inker solenoid head 51 and the fish line 57 perform the up and down movement together at the end while the fish line 57 performs the up and down movement. There is a problem in that wear occurs to interfere with the normal operation of the inker solenoid 55, so that the inking for the defective chip is not passed, as it is.
    The technical problem to be achieved by the present invention is to install the sensor unit on the Inker solenoid head which is the part that can check the normal operation of the Inker with the naked eye, if the normal operation is not displayed on the monitor and stop the continuous operation of the Inker, the bad chip is inking It is to provide an inker which can detect an operation error during inking that can prevent the process from proceeding to a subsequent process.
    1 is a cross-sectional view illustrating an inker capable of displaying a defective chip according to the prior art.
    2 is a cross-sectional view illustrating an inker capable of displaying a defective chip according to the present invention.
    In order to achieve the above technical problem, the present invention, the inker solenoid head (inker solenoid head) configured to enable the inking (inking) by moving up and down, the inker solenoid configured in the lower portion connected to the inker solenoid head, and the inker solenoid A fish line configured below to perform up and down movement, an ink reservoir configured at a lower portion in contact with the fish line, and a wafer formed by an up and down movement of the inker solenoid head and the fish line at the lower portion of the fish line It provides an inker having an inker tip (inker tip) for performing the inking, and a sensor unit for detecting the vertical movement of the inker solenoid head.
    According to a preferred embodiment of the present invention, the sensor unit preferably comprises a sensor unit body surrounding the inker solenoid head, and a first sensor and a second sensor installed therein.
    Preferably, the inker solenoid is further provided with a signal line connected to the outside.
    Preferably, the first and second sensors are optical sensors.
    According to the present invention, even if an operation error occurs during inking, the sensor unit detects the action and prevents the defective chip from proceeding to the subsequent process without inking, thereby reducing the cost loss that may occur in the packaging process.
    Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
    2 is a cross-sectional view illustrating an inker capable of displaying a defective chip according to the present invention.
    Referring to Figure 2, the inker according to the present invention is configured at the top of the inker solenoid head (inker solenoid head, 100) to enable the inking (inking) by moving up and down (inker solenoid configured in the lower portion connected to the inker solenoid head ( 104), a fish line (106) configured under the inker solenoid to perform vertical movement, an ink reservoir (108) configured under the fish line and abutting the fish line, and an inker solenoid configured under the fish line An inker tip 110 for inking the wafer by the vertical movement of the head and the fish line, and a sensor unit 112, 114, 116 capable of sensing the vertical movement of the inker solenoid head. In addition, the inker solenoid 104 is connected to a signal line 102 capable of receiving a signal from the outside for operation.
    The sensor units 112, 114, 116 here are the primary means for achieving the object of the present invention. That is, the site that can easily monitor the operation of the inker from the outside is the only vertical movement of the inker solenoid head 100 among the inkers. Therefore, the sensor unit main body 112 is formed in a form surrounding the inker solenoid head 100, and a first sensor 116, which is an optical sensor, is attached thereto to detect an upward movement of the inker solenoid head 100. The second sensor 114 is installed at the lower lower end of the first sensor 116 to monitor the downward movement of the inker solenoid head 100, and if the operation is not normally performed, a microcontroller for controlling the inker. Send a signal to. After that, stop the machine and send a warning message to the monitor. Therefore, the worker can take action in a situation where an operation error occurs without normal inking.
    The present invention is not limited to the above embodiments, and it is apparent that many modifications can be made by those skilled in the art within the technical spirit to which the present invention belongs.
    Therefore, according to the present invention described above, even if an operation error occurs during inking, by detecting the action through the sensor unit to prevent the defective chip to proceed to the subsequent process without inking to reduce the cost loss that can occur in the packaging process Can be.
    权利要求:
    Claims (1)
    [1" claim-type="Currently amended] Inker solenoid head is configured on the top to enable the inking (upking) by moving up (inker solenoid head);
    An inker solenoid configured at a lower portion connected to the inker solenoid head;
    A fish line configured under the inker solenoid to perform vertical movement;
    An ink reservoir configured to be in contact with the fish line;
    An inker tip configured under the fish line and performing inking of the wafer by vertical movement of the inker solenoid head and the fish line; And
    An inker capable of detecting an operation error during inking, characterized in that it comprises a sensor unit for sensing the vertical movement of the inker solenoid head.
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    同族专利:
    公开号 | 公开日
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    1998-09-28|Application filed by 윤종용, 삼성전자 주식회사
    1998-09-28|Priority to KR1019980040295A
    2000-04-25|Publication of KR20000021279A
    优先权:
    申请号 | 申请日 | 专利标题
    KR1019980040295A|KR20000021279A|1998-09-28|1998-09-28|Inker capable of detecting operation error during inking process|
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